A deep etching mechanism for trench-bridging silicon...

Nanotechnology 2016 / 03 Vol. 27; Iss. 9

A deep etching mechanism for trench-bridging silicon nanowires

Tasdemir, Zuhal, Wollschläger, Nicole, Österle, Werner, Leblebici, Yusuf, Alaca, B Erdem
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Volume:
27
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/27/9/095303
Date:
March, 2016
File:
PDF, 1.49 MB
english, 2016
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