Experimental investigation of hydrogen peroxide RF plasmas

Plasma Sources Science and Technology 2016 / 04 Vol. 25; Iss. 2

Experimental investigation of hydrogen peroxide RF plasmas

Barni, R, Decina, A, Zanini, S, D’Orazio, A, Riccardi, C
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Volume:
25
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/25/2/025003
Date:
April, 2016
File:
PDF, 1.39 MB
english, 2016
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