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SPIE Proceedings [SPIE MOEMS-MEMS - San Francisco, California (Saturday 23 January 2010)] MOEMS and Miniaturized Systems IX - Development of a tilt actuated micromirror for applications in laser interferometry
Kronast, Wolfgang, Schenk, Harald, Piyawattanametha, Wibool, Mescheder, Ulrich, Müller, Bernhard, Nimo, Antwi, Braxmaier, Claus, Schuldt, ThiloVolume:
7594
Year:
2010
Language:
english
DOI:
10.1117/12.839577
File:
PDF, 11.42 MB
english, 2010