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Linking the Operating Parameters of Chemical Vapor Deposition Reactors with Film Conformality and Surface Nano-Morphology
Cheimarios, Nikolaos, Garnelis, Sokratis, Kokkoris, George, Boudouvis, Andreas G.Volume:
11
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2011.5076
Date:
September, 2011
File:
PDF, 2.01 MB
english, 2011