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Effects of Metal Layer Morphology to Silicon Nanostructure Formation in Metal-Assisted Etching
Tsao, Chia-Wen, Chang, Chia-PinVolume:
12
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2012.5734
Date:
March, 2012
File:
PDF, 1.01 MB
english, 2012