Decorative black TiCxOy film fabricated by DC magnetron...

Applied Surface Science 2016 / 02 Vol. 364

Decorative black TiCxOy film fabricated by DC magnetron sputtering without importing oxygen reactive gas

Ono, Katsushi, Wakabayashi, Masao, Tsukakoshi, Yukio, Abe, Yoshiyuki
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Volume:
364
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2015.12.009
Date:
February, 2016
File:
PDF, 1.40 MB
english, 2016
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