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Fabrication and Nonlinear Thermomechanical Analysis of SU8 Thermal Actuator
Viannie, Leema Rose, Jayanth, G. R., Radhakrishna, V., Rajanna, K.Year:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2490485
File:
PDF, 1.78 MB
english, 2015