[ASME ASME 2005 International Mechanical Engineering Congress and Exposition - Orlando, Florida, USA (November 5 – 11, 2005)] Microelectromechanical Systems - Precise Prediction on Pull-In Instability of a Deformable Micro-Plate Actuated by Distributed Electrostatic Force and Approximate Closed-Form Solutions
Chao, Paul C.-P., Chiu, Chi-WeiVolume:
2005
Year:
2005
Language:
english
DOI:
10.1115/imece2005-82241
File:
PDF, 246 KB
english, 2005