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[ASME ASME 2006 International Mechanical Engineering Congress and Exposition - Chicago, Illinois, USA (November 5 – 10, 2006)] Heat Transfer, Volume 2 - Modeling of Halide Chemical Vapor Deposition of SiC
Wang, Rong, Ma, Ronghui, Dhanaraj, Govindhan, Chen, Yi, Dudley, MichaelVolume:
2006
Year:
2006
Language:
english
DOI:
10.1115/imece2006-14381
File:
PDF, 717 KB
english, 2006