Self-assembly nanostructured gold for high aspect ratio silicon microstructures by metal assisted chemical etching
Romano, L., Kagias, M., Jefimovs, K., Stampanoni, M.Volume:
6
Year:
2016
Language:
english
Journal:
RSC Adv.
DOI:
10.1039/C5RA24947C
File:
PDF, 1.65 MB
english, 2016