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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - Micromachined accelerometer with a movable-gate-transistor sensing element
Edmans, Daniel M., Gutierrez, Adolfo O., Cormeau, Chris, Maby, Edward W., Kaufman, Howard, Chau, Kevin H., French, Patrick J.Volume:
3224
Year:
1997
Language:
english
DOI:
10.1117/12.284530
File:
PDF, 1.25 MB
english, 1997