Combined AFM Nano-Machining and Reactive Ion Etching to...

Journal of Nanoscience and Nanotechnology 2010 / 11 Vol. 10; Iss. 11

Combined AFM Nano-Machining and Reactive Ion Etching to Fabricate High Aspect Ratio Structures

Peng, Ping, Shi, Tielin, Liao, Guanglan, Tang, Zirong
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Volume:
10
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2010.2858
Date:
November, 2010
File:
PDF, 4.71 MB
english, 2010
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