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A modified model for circular scanner-type nano-mirrors with size-dependency, squeeze film damping and Casimir effects by considering finite conductivity
Sedighi, Hamid M., Moory-Shirbani, M., Koochi, A., Abadyan, M.Volume:
23
Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2852-0
Date:
April, 2017
File:
PDF, 3.14 MB
english, 2017