![](/img/cover-not-exists.png)
[IEEE 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Rome, Italy (2015.7.27-2015.7.30)] 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - The nanodamascene process: A versatile fabrication technique for nanoelectronic applications
Drouin, D., Droulers, G., Labalette, M., Sang, B. Lee, Harvey-Collard, P., Richard, J.-P., Pioro-Ladriere, M., Ecoffey, S., Souifi, A., Monfray, S.Year:
2015
Language:
english
DOI:
10.1109/NANO.2015.7388860
File:
PDF, 1.42 MB
english, 2015