SPIE Proceedings [SPIE Photonics Europe - Strasbourg,...

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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 26 April 2004)] MEMS, MOEMS, and Micromachining - Static and dynamic characterization of MEMS and MOEMS devices using optical interference microscopy

Grigg, David, Felkel, Eric, Roth, John, Colonna de Lega, Xavier, Deck, Leslie, de Groot, Peter J., Urey, Hakan, El-Fatatry, Ayman
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Volume:
5455
Year:
2004
Language:
english
DOI:
10.1117/12.546211
File:
PDF, 587 KB
english, 2004
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