Growth of Czochralski Silicon Crystals Having Ultralow Carbon Concentrations
Nagai, Yuta, Kashima, Kazuhiko, Nakagawa, Satoko, Higasa, MitsuoVolume:
242
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.242.3
Date:
October, 2015
File:
PDF, 498 KB
english, 2015