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Strain mapping of semiconductor specimens with nm-scale resolution in a transmission electron microscope
Cooper, David, Denneulin, Thibaud, Bernier, Nicolas, Béché, Armand, Rouvière, Jean-LucVolume:
80
Language:
english
Journal:
Micron
DOI:
10.1016/j.micron.2015.09.001
Date:
January, 2016
File:
PDF, 6.31 MB
english, 2016