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Investigation of nano-electromechanical-systems using surface acoustic waves
F.W. Beil, A. Wixforth, R.H. BlickVolume:
13
Year:
2002
Language:
english
Pages:
4
DOI:
10.1016/s1386-9477(02)00173-x
File:
PDF, 236 KB
english, 2002