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Effect of ion energy and dose on the positioning of 2D-arrays of Si nanocrystals ion beam synthesized in thin SiO2 layers
M. Carrada, C. Bonafos, G. Ben Assayag, D. Chassaing, P. Normand, D. Tsoukalas, V. Soncini, A. ClaverieVolume:
17
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s1386-9477(02)00855-x
File:
PDF, 514 KB
english, 2003