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Study of PMMA recoveries on micrometric patterns replicated by nano-imprint lithography
Christel Martin, Laurence Ressier, Jean Pierre PeyradeVolume:
17
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s1386-9477(02)00859-7
File:
PDF, 146 KB
english, 2003