Nanolithography by local anodic oxidation of metal films using an atomic force microscope
R Held, T Heinzel, P Studerus, K EnsslinVolume:
2
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s1386-9477(98)00153-2
File:
PDF, 221 KB
english, 1998