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SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX - Helios: a compact superconducting x-ray source for production lithography
Andrews, David E., Wilson, M. N., Smith, Alistair I., Kempson, Vince C., Purvis, A. L., Anderson, R. J., Bhutta, A. S., Jorden, Anthony R., Resnick, Douglas J.Volume:
1263
Year:
1990
Language:
english
DOI:
10.1117/12.20152
File:
PDF, 332 KB
english, 1990