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SPIE Proceedings [SPIE 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies - Dalian, China (Monday 26 April 2010)] 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Influence of spatial temperature distribution on high accuracy interferometric metrology
Gu, Yongqiang, Miao, Erlong, Yan, Feng, Zhang, Jian, Yang, Huaijiang, Zhang, Yudong, Sasián, José, Xiang, Libin, To, SandyVolume:
7656
Year:
2010
Language:
english
DOI:
10.1117/12.867751
File:
PDF, 268 KB
english, 2010