Effect of the deposition temperature on the chemical vapour deposition of tetraethoxysilane on ZSM-5
Heiko Manstein, Klaus P. Möller, Walter Böhringer, Cyril T. O'ConnorVolume:
51
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s1387-1811(01)00466-8
File:
PDF, 271 KB
english, 2002