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Fabrication of nanocone arrays by two step metal assisted chemical etching method
Shimizu, Tomohiro, Tanaka, Norihiro, Tada, Yoshihiro, Hara, Yasuhiro, Nakamura, Noriaki, Taniuchi, Junichi, Takase, Koichi, Ito, Takeshi, Shingubara, ShosoVolume:
153
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.01.030
Date:
March, 2016
File:
PDF, 1.47 MB
english, 2016