Fabrication of nanocone arrays by two step metal assisted...

Fabrication of nanocone arrays by two step metal assisted chemical etching method

Shimizu, Tomohiro, Tanaka, Norihiro, Tada, Yoshihiro, Hara, Yasuhiro, Nakamura, Noriaki, Taniuchi, Junichi, Takase, Koichi, Ito, Takeshi, Shingubara, Shoso
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Volume:
153
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2016.01.030
Date:
March, 2016
File:
PDF, 1.47 MB
english, 2016
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