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SPIE Proceedings [SPIE Optoelectronic and Electronic Sensors IV - Gliwice, Poland (Tuesday 13 June 2000)] Optoelectronic and Electronic Sensors IV - Compensation of convex corners in sensors with bossed structure etched in TMAH and TMAH+IPA solutions
Barycka, Irena, Dziuban, Jan, Kramkowska, Malgorzata, Zubel, Irena, Fraczek, JerzyVolume:
4516
Year:
2001
Language:
english
DOI:
10.1117/12.435942
File:
PDF, 652 KB
english, 2001