Energy distributions of secondary ions sputtered from aluminium and magnesium by Ne+, Ar+ and O2+: a comprehensive study
A Tolstogouzov, S Daolio, C Pagura, C.L GreenwoodVolume:
214
Year:
2002
Language:
english
Pages:
11
DOI:
10.1016/s1387-3806(02)00523-7
File:
PDF, 195 KB
english, 2002