SPIE Proceedings [SPIE Smart Materials, Nano- and Micro-Smart Systems - Adelaide, Australia (Sunday 10 December 2006)] Smart Structures, Devices, and Systems III - Thin silicon shadow masks for organic light-emitting diodes (OLED) deposition processes
Tseng, Ching-Chang, Chiu, Chen-Wei, Zhung, Kai-Xiang, Lee, Jiun-Haw, Su, Guo-Dung John, Al-Sarawi, Said F.Volume:
6414
Year:
2007
Language:
english
DOI:
10.1117/12.692440
File:
PDF, 833 KB
english, 2007