SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and...

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SPIE Proceedings [SPIE MOEMS-MEMS 2008 Micro and Nanofabrication - San Jose, CA (Saturday 19 January 2008)] Micromachining and Microfabrication Process Technology XIII - Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic

Stillman, J., Judy, J., Helvajian, H., Maher, Mary-Ann, Chiao, Jung-Chih, Resnick, Paul J.
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Volume:
6882
Year:
2008
Language:
english
DOI:
10.1117/12.761895
File:
PDF, 456 KB
english, 2008
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