Reactive processes in the high target utilization...

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Journal of the European Ceramic Society 2016 / 1

Reactive processes in the high target utilization sputtering (HiTUS) W-C based coatings

Lofaj, František, Kvetková, Lenka, Hviščová, Petra, Gregor, Maroš, Ferdinandy, Milan
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Language:
english
Journal:
Journal of the European Ceramic Society
DOI:
10.1016/j.jeurceramsoc.2015.12.043
Date:
January, 2016
File:
PDF, 2.23 MB
english, 2016
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