SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Ultrafast X-Ray Sources and Detectors - Progress report on a 14.4-nm micro-exposure tool based on a laser-produced-plasma: debris mitigation system results and other issues
Bollanti, S., Amodio, D., Conti, A., Di Lazzaro, P., Flora, F., Mezi, L., Murra, D., Torre, A., Zheng, C. E., Garoli, D., Pelizzo, M. G., Nicolosi, P., Mattarello, V., Rigato, V., Gerardino, A., ChangVolume:
6703
Year:
2007
Language:
english
DOI:
10.1117/12.751442
File:
PDF, 777 KB
english, 2007
File converter
More search results
More benefits 
