Ultra-Low Temperature ( 180 C) Solid-Phase Crystallization...

ECS Transactions 2015 / 10 Vol. 69; Iss. 5

Ultra-Low Temperature ( 180 C) Solid-Phase Crystallization of GeSn on Insulator Triggered by Laser-Anneal Seeding

Matsumura, R., Moto, K., Kai, Y., Sadoh, T., Ikenoue, H., Miyao, M.
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Volume:
69
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/06905.0301ecst
Date:
October, 2015
File:
PDF, 105 KB
english, 2015
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