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[IEEE 2004 24th International Conference on Microelectronics - Nis, Serbia (16-19 May 2004)] 2004 24th International Conference on Microelectronics (IEEE Cat. No.04TH8716) - Concurrent Engineering - a tool for improving MEMS research and manufacturing
Bazu, M.Volume:
1
Year:
2004
Language:
english
DOI:
10.1109/ICMEL.2004.1314556
File:
PDF, 542 KB
english, 2004