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SPIE Proceedings [SPIE SPIE Lithography Asia - Taiwan - Taipei, Taiwan (Tuesday 4 November 2008)] Lithography Asia 2008 - The noble resists composed of cationic and anionic polymerizable PAGs
Oh, Jung Hoon, Seo, Dong Chul, Joo, Hyun Sang, Jung, Sung Do, Kim, Jin Ho, Lee, Seung Jae, Park, Ran Ra, Han, JoonHee, Park, Joo Hyeon, Chen, Alek C., Lin, Burn, Yen, AnthonyVolume:
7140
Year:
2008
Language:
english
DOI:
10.1117/12.804631
File:
PDF, 335 KB
english, 2008