Effect of eddy formation on gas mixture homogeneity near a substrate in a vertical reactor for CdHgTe deposition
Shabarova, L. V., Kirillov, Yu. P., Moiseev, A. N., Chilyasov, A. V., Stepanov, B. S.Volume:
52
Language:
english
Journal:
Inorganic Materials
DOI:
10.1134/S002016851602014X
Date:
February, 2016
File:
PDF, 1.62 MB
english, 2016