Ion-beam polishing of fused silica substrates for imaging...

Applied Optics 2016 / 02 Vol. 55; Iss. 6

Ion-beam polishing of fused silica substrates for imaging soft x-ray and extreme ultraviolet optics

Chkhalo, N. I., Churin, S. A., Mikhaylenko, M. S., Pestov, A. E., Polkovnikov, V. N., Salashchenko, N. N., Zorina, M. V.
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Volume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.001249
Date:
February, 2016
File:
PDF, 997 KB
english, 2016
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