Silicon Photonics R&D and Manufacturing on 300-mm Wafer...

Journal of Lightwave Technology 2016 / 1 Vol. 34; Iss. 2

Silicon Photonics R&D and Manufacturing on 300-mm Wafer Platform

Boeuf, Frederic, Cremer, Sebastien, Temporiti, Enrico, Fere, Massimo, Shaw, Mark, Baudot, Charles, Vulliet, Nathalie, Pinguet, Thierry, Mekis, Attila, Masini, Gianlorenzo, Petiton, Herve, Le Maitre, P
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Volume:
34
Language:
english
Journal:
Journal of Lightwave Technology
DOI:
10.1109/JLT.2015.2481602
Date:
January, 2016
File:
PDF, 1.25 MB
english, 2016
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