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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Development of TMAH anisotropic etching manufacturing process for MEMS
Tsaur, Jiunn-Jye, Yang, Shih-I, Du, Chen-Hsun, Lin, Zhongshen, Huang, Cheng-Tang, Lee, Cheng-Kuo, Karam, Jean Michel, Yasaitis, John A.Volume:
4174
Year:
2000
Language:
english
DOI:
10.1117/12.396424
File:
PDF, 1.03 MB
english, 2000