Communication—Halide Ions in TEG-Based Levelers Affecting...

Journal of The Electrochemical Society 2016 Vol. 163; Iss. 5

Communication—Halide Ions in TEG-Based Levelers Affecting TSV Filling Performance

Kim, Myung Jun, Seo, Youngran, Oh, Jung Hwan, Lee, Yoonjae, Kim, Hoe Chul, Kim, Young Gyu, Kim, Jae Jeong
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Volume:
163
Year:
2016
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.0101606jes
File:
PDF, 343 KB
english, 2016
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