Etudes microlithographiques de résines négatives renfermant...

Etudes microlithographiques de résines négatives renfermant des unités tétrathiafulvalènes sensibles aux électrons

Louis Giral, Claude Montginoul, Aumduth Mungroo, René Sagnes, François Schué, Jean-Charles Guibert
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Volume:
204
Year:
1993
Pages:
17
DOI:
10.1002/apmc.1993.052040101
File:
PDF, 1.47 MB
1993
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