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[IEEE 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Rome, Italy (2015.7.27-2015.7.30)] 2015 IEEE 15th International Conference on Nanotechnology (IEEE-NANO) - Single-mask field emission based tunable MEMS tunneling accelerometer
Kumar, Varun, Xiaobo Guo,, Pourkamali, SiavashYear:
2015
Language:
english
DOI:
10.1109/NANO.2015.7388718
File:
PDF, 836 KB
english, 2015