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[IEEE 2006 IEEE Nanotechnology Materials and Devices Conference - Gyeongju, South Korea (2006.10.22-2006.10.25)] 2006 IEEE Nanotechnology Materials and Devices Conference - Perspective of nano technology in semiconductor industry
Kwang-Pyuk Suh,Year:
2006
Language:
english
DOI:
10.1109/NMDC.2006.4388698
File:
PDF, 203 KB
english, 2006