Effect of Oxygen Flow Rate and Post Annealing on Vanadium Oxide Thin Films Prepared by DC Pulse Magnetron Sputtering
Hincheeranun, Wantanee, Aiempanakit, Montri, Aiempanakit, Kamon, Horprathum, Mati, Patthanasetakul, Viyapon, Nuntawong, Noppadon, Chananonnawathorn, Chanunthorn, Limwichean, Saksorn, Eiamchai, PitakVolume:
675-676
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.675-676.233
Date:
January, 2016
File:
PDF, 403 KB
english, 2016