Reliability design of thermally actuated MEMS switches based on V-shape beams
Pustan, Marius, Chiorean, Radu, Birleanu, Corina, Dudescu, Cristian, Muller, Raluca, Baracu, Angela, Voicu, RodicaLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-015-2789-8
Date:
January, 2016
File:
PDF, 1.73 MB
english, 2016