Mask-free regrowth of GaN p-i-n structure on selective-area...

Mask-free regrowth of GaN p-i-n structure on selective-area Si-implanted n-GaN template layer

Sheu, Jinn-Kong, Chen, Po-Cheng, Yeh, Yu-Hsiang, Kuo, Shih-Hsun, Lee, Ming-Lun, Liao, Po-Hsun, Lai, Wei-Chih
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Volume:
108
Language:
english
Journal:
Acta Materialia
DOI:
10.1016/j.actamat.2016.02.020
Date:
April, 2016
File:
PDF, 2.43 MB
english, 2016
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