Effects of thermal annealing on photoluminescence of Si+/C+...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2016 / 04 Vol. 372

Effects of thermal annealing on photoluminescence of Si+/C+ implanted SiO2 films

Chen, Yin-Yu, Chao, Der-Sheng, Tsai, Hsu-Sheng, Liang, Jenq-Horng
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Volume:
372
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2016.02.013
Date:
April, 2016
File:
PDF, 2.08 MB
english, 2016
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