Reactive multi-pulse HiPIMS deposition of oxygen-deficient...

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Thin Solid Films 2016 / 2

Reactive multi-pulse HiPIMS deposition of oxygen-deficient TiOx thin films

Tiron, V., Velicu, I.-L., Dobromir, M., Demeter, A., Samoila, F., Ursu, C., Sirghi, L.
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2016.02.025
Date:
February, 2016
File:
PDF, 1.11 MB
english, 2016
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