A small-gap electrostatic micro-actuator for large...

Nature Communications 2015 / 12 Vol. 6

A small-gap electrostatic micro-actuator for large deflections

Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam
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Volume:
6
Language:
english
Journal:
Nature Communications
DOI:
10.1038/ncomms10078
Date:
December, 2015
File:
PDF, 677 KB
english, 2015
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