Time-Resolved Micro-Raman Stress Spectroscopy for...

Journal of Microelectromechanical Systems 2016 / 2 Vol. 25; Iss. 1

Time-Resolved Micro-Raman Stress Spectroscopy for Single-Crystal Silicon Resonators Using a MEMS Optical Chopper

Tsuchiya, Toshiyuki, Kogita, Yusuke, Taniyama, Akira, Hirai, Yoshikazu, Sugano, Koji, Tabata, Osamu
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Volume:
25
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2503723
Date:
February, 2016
File:
PDF, 3.52 MB
english, 2016
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