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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Fabrication of monolithic photovoltaic minimodules using bulk micromachining techniques.
Bermejo, Sandra, Ortega, Pablo R., Castaner, Luis, Chiao, Jung-Chih, Varadan, Vijay K., Can, CarlesVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.498195
File:
PDF, 267 KB
english, 2003